Vacuum oven for finest dry cleaning
We recommend to bake out parts under vacuum in special ovens after the wet fine or ultra-fine cleaning. In this way, residual contaminations of atmospheric components can be removed effectively from the surface and can be pumped out. Another effect of baking is, depending on the used material, a significant reduction of the outgassing rate.
Our unique, modularly constructed vacuum ovens VOBOS can be designed to your desired process and to your parts and ensure an increased efficiency of your cleaning process. We have also developed our own oven series to meet the high requirements of the semiconductor industry.
Overview - Our vacuum oven
VOBOS - vacuum oven for bake out processes
VOBOS, the vacuum oven series from TREAMS, was specially developed to efficiently bake components and assemblies in high purity cleaning process lines.
Because of temperature dependence of the desorption and diffusion rates of all materials, cleanliness and outgassing rates are improved by heating parts. Therefor VOBOS systems are suitable to complete precision and ultra fine cleaning systems.
- VOBOS provides intelligent solutions for an efficient design of the entire temperature control cycle
- VOBOS allows the establishment of product-specific heating programmes
- VOBOS is equipped with flexibly insertable heating plates depending on the component size
- VOBOS can optionally be equipped with an integrated mass spectrometer for the testing of the component outgassing rates
- VOBOS can optionally be equipped with TQCM
VOBOS pro - Vacuum bake-out oven for dry cleaning in the semiconductor sector
The newly developed vacuum oven series VOBOS pro is designed to meet the specific requirements of the semiconductor industry, with a focus on efficiency and cost-effectiveness. VOBOS pro meets the current specifications of customers in this industry and offers an optimum cost-benefit ratio. Advanced technologies and a prioritization of the essential product features ensure that the high requirements are met at minimum cost.
VOBOS pro is designed for use in cleanrooms and achieves an effective and sustainable cleaning effect thanks to a pump system specially tailored to your components and requirements. Precise control of the internal temperature enables constant and reproducible bake-out processes.
In addition, the entire system is designed for ultra-high vacuum applications and processes in clean rooms. Low outgassing seals ensure that the VOBOS pro meets the strict cleanliness requirements of the semiconductor industry for vacuum systems.
Standard configuration
- Stand-alone device
- Cylindrical chamber with two shelves
- Low outgassing FKM sealing
- Backing pump 15m³/h
- Heated jacket and back wall
- 9" basic control panel
- Low partical design, free of heavy metals and silicone
Options
- Larger backing pump
- Turbomolecular pump
- Heated door
- Kalrez sealing
- Heating under gas flow
- Wall installation
What else sets our systems apart:
- Specification-compliant processing
- Design according to outgassing budgets
- Low-particle heating solution
- Remote support: short response and fault clearance times
- Intuitive operation: easy handling even for untrained personnel
- Individual service concept: modular service contracts depending on customer requirements
