VOBOS pro
Vacuum bake out oven for semiconductor
VOBOS pro presents itself as the individual further development within the VOBOS series, specially designed for the precise baking of components according to the highest specification requirements. A tailor-made solution approach that meets the needs of demanding customers in the semiconductor sector.
- VOBOS pro basically fulfills the common specifications in the semiconductor sector
- VOBOS pro is equipped with a vacuum chamber optimized for your components
- VOBOS pro impresses with a highly automated control system and an intuitive user interface
- VOBOS pro uses a low-particle and efficient heating solution for temperature control
- VOBOS pro can be operated in clean rooms without any problems
Due to the temperature dependence of the desorption and diffusion rates of all materials, cleanliness and outgassing values are improved by heating. VOBOS pro systems are therefore suitable for supplementing fine and ultra-fine cleaning lines in the supply chain of the semiconductor industry.
