Vacuum bake-out oven for dry cleaning in the semiconductor sector
Maximum efficiency for the smallest circuits
The newly developed vacuum oven series VOBOS pro is designed to meet the specific requirements of the semiconductor industry, with a focus on efficiency and cost-effectiveness. VOBOS pro meets the current specifications of customers in this industry and offers an optimum cost-benefit ratio. Advanced technologies and a prioritization of the essential product features ensure that the high requirements are met at minimum cost.
VOBOS pro is designed for use in cleanrooms and achieves an effective and sustainable cleaning effect thanks to a pump system specially tailored to your components and requirements. Precise control of the internal temperature enables constant and reproducible bake-out processes.
In addition, the entire system is designed for ultra-high vacuum applications and processes in clean rooms. Low outgassing seals ensure that the VOBOS pro meets the strict cleanliness requirements of the semiconductor industry for vacuum systems.
Developed to take your cleaning processes to the next level!
- Specification-compliant processing
- Design according to outgassing budgets
- Low-particle heating solution
Configuration
Standard
- Stand-alone device
- Cylindrical chamber with two shelves
- Low outgassing FKM sealing
- Backing pump 15m³/h
- Heated jacket and back wall
- 9" basic control panel
- Low partical design, free of heavy metals and silicone
What else sets our systems apart:
- Remote support: short response and fault clearance times
- Intuitive operation: easy handling even for untrained personnel
- Individual service concept: modular service contracts depending on customer requirements
