We recommend to bake out parts under vacuum in special ovens after the wet  fine or ultra-fine cleaning. In this way, residual contaminations of atmospheric components can be removed effectively from the surface and can be pumped out. Another effect of baking is, depending on the used material, a significant reduction of the outgassing rate.

Our unique, modularly constructed vacuum ovens VOBOS can be designed to your desired process and to your parts and ensure an increased efficiency of your cleaning process. We have also developed our own oven series to meet the high requirements of the semiconductor industry.