Build up your expertise

Suppliers in the semiconductor industry are increasingly shifting critical steps such as cleaning, vacuum bake-out and residual gas analysis to their own production facilities. This offers crucial advantages:

•    Greater flexibility and faster response times
•    Reduced part transport and lower logistics costs
•    Unique selling points compared to competitors
•    Building expertise in vacuum processes at EUVL
•    Reduced risk through improved process control and data sovereignty

Our solution: TREAMS focus

With the focus product line, TREAMS offers vacuum systems specifically designed for the GSA-oriented supply chain. These systems support the quality-assured execution of dry cleaning processes and residual gas analysis (RGA) for component qualification.

Compliant and targeted

To meet process conditions according to the GSA 07 2221 and GSA 07 9510 standards, the focus systems are consistently designed to meet these requirements. This means for you:

•    Reproducible, validatable processes
•    Integrated residual gas analysis for seamless qualification
•    Documentation and traceability for audits and approvals