ARGAT focus
Residual gas analysis tool with focus on GSA
ARGAT focus - the ideal solution
Residual gas analysis (RGA) is used in the semiconductor industry to reliably detect filmic or molecular contaminants under vacuum using mass spectrometry. For systems to be used in established supply chains, their design, components, and report output must meet end-customer standards.
ARGAT focus is an RGA system developed precisely for these requirements: reliable and standards-compliant.
Features
- Fully automated, including ASML-compliant report generation
- Cost-effective system design
- Integrated mass spectrometer with amu 0-200
- Standard cylinder chamber sizes: Mini, 125L, 500L
- Intuitive, proprietary HMI for easy operation
- Component selection optimized for low maintenance costs
- Various service options, such as remote access for configuration
The following options are also available:
- Special sizes and customer-specific chamber geometries
- Integrated HiQuad mass spectrometer
- Different pump systems designed for specific requirements
- HMI customizations according to customer specifications
- Customer-specific data transfer and interfaces
- Gate valve upstream for TMP and QMS for extended service life
With VOBOS focus, a vacuum oven for dry cleaning, TREAMS also offers the ideal addition to your process chain. The oven removes volatile residues and condensable contaminants under defined vacuum and temperature conditions.
