VOBOS focus
Vacuum bake out oven with focus on GSA
VOBOS focus - the perfect addition
To remove even the last molecular residues from geometrically complex surfaces, baking out wet-cleaned components under defined vacuum and temperature conditions is standard practice in the semiconductor industry after wet cleaning. This typically takes place in vacuum ovens immediately before residual gas analysis (ARGAT focus).
VOBOS focus offers the perfect complement to your GSA-compliant process chain, ensuring even cleaner and drier components for optimal preparation of your components for RGA.
Features
- Effective cleaning performance
- Fully automated operation
- Cost-efficient system design
- Standard cylinder chamber sizes: Mini, 125l, 500l
- Intuitive, proprietary HMI
- Temperature control up to 120°C on the chamber interior
- Component selection optimized for low maintenance costs
- Diverse service options (e.g., remote access)
The following options are also available:
- Custom chamber sizes
- HMI customization
- Customer-specific data transfer
- "Professional" control system with feature-rich recipe editor
- Higher temperature ranges, e.g., through radiant heaters or active temperature control with pillow plate chambers
- Different pump systems designed for specific requirements
With ARGAT focus, the RGA system designed according to ASML standards, TREAMS also offers the ideal analytical conclusion to your GSA-compliant process chain.
